Industrial Acceleration Sensing Transmitter Using Capacitive MEMS Accelerometer
نویسنده
چکیده
This paper presents the overall design of an industrial vibration transmitter using Micro Electro Mechanical System (MEMS) capacitive accelerometer. It describes the accelerometer sensor interfacing circuit, rms-to-dc converter and voltage to current loop converter circuit design, calibration procedure and mounting methods. The industrial vibration transmitter output can be customized to obtain either acceleration or velocity with root mean square (rms) or peak value signal. The electronic circuit was designed to measure vibration in motion. The output of the transmitter is a current signal (4-20mA) which is proportional to input acceleration (0-10g rms). The AC coupling circuit for accelerometer sensor interfacing, RMS detector and industrial current loop converter circuit are implemented in a single printed circuit board. The prototype consists of 2 pin top connector for power input (24VDC), current output signal and stainless steel mechanical housing assembly with bottom thread connection for mounting. The loop powered acceleration vibration transmitter is employed for vibration monitoring and control applications.
منابع مشابه
Design Optimization of Capacitive MEMS Accelerometer for Improved Sensitivity
In this paper design of a two-axis capacitive accelerometer is described. Variation of capacitance of the device with applied acceleration as well as sensitivity of the device is analyzed. The performance analysis of the device is done using ANSYS Multyphysics software. From the analysis results, a capacitive mems accelerometer with enhanced sensitivity has been proposed. The sensitivity of the...
متن کاملA Low-Noise Low-Offset Capacitive Sensing Amplifier for a 50- g= Hz Monolithic CMOS MEMS Accelerometer
This paper describes a CMOS capacitive sensing amplifier for a monolithic MEMS accelerometer fabricated by post-CMOS surface micromachining. This chopper stabilized amplifier employs capacitance matching with optimal transistor sizing to minimize sensor noise floor. Offsets due to sensor and circuit are reduced by ac offset calibration and dc offset cancellation based on a differential differen...
متن کاملNovel Capacitive Sensing System Design of a Microelectromechanical Systems Accelerometer for Gravity Measurement Applications
This paper presents an in-plane sandwich nano-g microelectromechanical systems (MEMS) accelerometer. The proof-mass fabrication is based on silicon etching through technology using inductive coupled plasma (ICP) etching. The capacitive detection system, which employs the area-changing sensing method, combines elementary capacitive pickup electrodes with periodic-sensing-array transducers. In or...
متن کاملIdentification of Capacitive MEMS Accelerometer Structure Parameters for Human Body Dynamics Measurements
Due to their small size, low weight, low cost and low energy consumption, MEMS accelerometers have achieved great commercial success in recent decades. The aim of this research work is to identify a MEMS accelerometer structure for human body dynamics measurements. Photogrammetry was used in order to measure possible maximum accelerations of human body parts and the bandwidth of the digital acc...
متن کاملOptimization of MEMS Capacitive Accelerometer as Fully Implantable Middle Ear Microphone for Hearing Aid
This work describes the design and optimization of three prototypes of microelectromechanical systems (MEMS) capacitive accelerometer-based middle ear microphone. The microphone is intended for middle ear hearing aids as well as future fully implantable cochlear prosthesis. The analysis is done using COMSOL Multiphysics. The maximum applied acceleration was considered 1g. Human temporal bones a...
متن کامل